We are looking forward to hearing from you!

「Film coating service」

We can arrange various film coating services for 2 inch to 450 mm.
The available films depend on the diameter.

SiO2 films: SiO2, RTO, LP-TEOS, HDP-USG, P-TEOS, PSG, BPSG, BSG, LP-CVD, PE-CVD

Nitride films: HCD-SiN, DCS-SiN, P-SiN, LP-SiN, LP-CVD, PE-CVD

Metal films: TaN, Ta, Cu, Al, AlN, Al-Si, Al-Si-Cu, Ni, W, W-Si-Cu

Other films: Poly-Si, a-Si, SiC, Low-k (SiOC and Organic Chemistry films), Graphene, Graphite


＊Resist, exposure & etching: 4-12 inch

＊Wafer with test patterning: 6-12 inch

＊We can arrange for exposure & etching services for 8 & 12 inch, using your reticle.

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